The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Dec. 28, 2022
Semes Co., Ltd., Cheonan-si, KR;
Juyeon Cho, Suwon-si, KR;
Youngjun Lee, Cheonan-si, KR;
Kwangsoo Kim, Cheonan-si, KR;
Kisang Eum, Cheonan-si, KR;
Wooram Lee, Seoul, KR;
Jongwha Kang, Cheonan-si, KR;
Younghun Jung, Cheonan-si, KR;
Junghyun Lee, Cheonan-si, KR;
Dongwoon Park, Seoul, KR;
Sunwook Jung, Hwaseong-si, KR;
Semes Co., LTD., Chungcheongnam-do, KR;
Abstract
A substrate processing apparatus includes a bake chamber, a chamber door that opens and closes an opening of the bake chamber, a first support plate in the bake chamber, a first partition wall, which partitions a space provided on the first support plate into first heat treatment spaces spaced apart from each other in a first horizontal direction, and extends in a second horizontal direction and a vertical direction, first heat treatment modules arranged in the first heat treatment spaces, a first exhaust duct extending in the first horizontal direction across the first heat treatment spaces, a first sealing bracket coupled to the first exhaust duct, a first horizontal packing configured to seal a gap between the first sealing bracket and the chamber door, and a first vertical packing configured to seal a gap between the first partition wall and the chamber door.