The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 16, 2025
Filed:
Sep. 27, 2022
Fujimi Incorporated, Aichi, JP;
Hooi-Sung Kim, Tualatin, OR (US);
FUJIMI INCORPORATED, Aichi, JP;
Abstract
The present disclosure relates to a polishing composition enabling an improved molybdenum removal rate while reducing etching of molybdenum (high Mo RR/Mo SER ratio) and simultaneously enabling a high ratio of molybdenum removal rate to silicon oxide removal rate (Mo:TEOS removal rate selectivity), wherein, the polishing composition comprises an abrasive, a molybdenum (Mo) removal rate enhancer, an organic acid, an oxidizer, a corrosion inhibitor, and water, combined in specified amounts to provide a composition with advantageous properties such as high Mo RR/Mo SER ratio and high Mo:TEOS removal rate selectivity, thus providing a composition well suited for polishing a molybdenum surface.