The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
May. 31, 2022
Changxin Memory Technologies, Inc., Anhui, CN;
Changxin Memory Technologies, Inc., Hefei, CN;
Abstract
A semiconductor structure and the method for forming the same are provided. The method includes: providing a substrate including an active region; forming a word line in the substrate including a first portion and a second portion located at the end of the first portion, wherein the second portion of the word line protrudes from the first portion of the word line along the direction perpendicular to the substrate; forming a dielectric layer covering the substrate; and etching the dielectric layer and a part of the substrate to simultaneously form a first contact hole exposing the second portion of the word line and a second contact hole exposing the active region. The invention reduces the etching time and improves the etching efficiency. It avoids an excessively large etching depth of the second contact hole, thereby reducing the damage to the active region and the leakage current inside the semiconductor structure.