The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Feb. 18, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takehisa Saito, Miyagi, JP;
Yohei Yamazawa, Miyagi, JP;
Toshiki Nakajima, Miyagi, JP;
Daisuke Kurashina, Miyagi, JP;
Naoki Fujiwara, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01Q 1/36 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3211 (2013.01); H01Q 1/362 (2013.01); H01J 2237/327 (2013.01);
Abstract
There is provided an antenna for inductively coupled plasma excitation. The antenna comprises a plurality of coil assemblies and a conductive plate connected to the plurality of coil assemblies, the conductive plate having a central opening and at least one plate terminal.