The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2025
Filed:
Jan. 05, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
David Fenwick, Los Altos, CA (US);
Chengtsin Lee, Union City, CA (US);
Jennifer Y. Sun, Mountain View, CA (US);
Yikai Chen, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/08 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/46 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); C23C 14/30 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0694 (2013.01); C23C 14/0021 (2013.01); C23C 14/06 (2013.01); C23C 14/08 (2013.01); C23C 14/081 (2013.01); C23C 14/082 (2013.01); C23C 14/083 (2013.01); C23C 14/46 (2013.01); C23C 16/4404 (2013.01); H01J 37/32477 (2013.01); H01J 37/32495 (2013.01); H01J 37/32559 (2013.01); H01J 37/3441 (2013.01); C23C 14/30 (2013.01);
Abstract
An article has a body having a protective coating. The protective coating is a thin film that includes a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MOF, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.