The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Oct. 12, 2022
Tokyo Electron Limited, Tokyo, JP;
Takeshi Kobayashi, Iwate, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
An ignition controlling method is performed in a film forming apparatus including: a processing container that accommodates a substrate; a plasma box formed on the processing container; a pair of electrodes arranged to sandwich the plasma box therebetween; and an RF power supply connected to the pair of electrodes via a matching box including a variable capacitor. The ignition controlling method includes: storing first information indicating a voltage between the electrodes for each of a plurality of adjustment positions of the variable capacitor, and second information indicating a voltage between the electrodes and the substrate; determining an initial position of the variable capacitor based on the first and second information; and selecting an area where a plasma ignition is to be performed from the plasma box and the processing container, by setting the adjustment positions of the variable capacitor to the initial position.