The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 02, 2025

Filed:

Jul. 21, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

En-Tian Lin, Taoyuan, TW;

Chiao-Ling Weng, Taichung, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 31/22 (2006.01); G01N 33/18 (2006.01);
U.S. Cl.
CPC ...
G01N 31/228 (2013.01); G01N 31/225 (2013.01); G01N 33/1893 (2013.01);
Abstract

A method for determining the concentration of a compound in ultrapure water is provided. The method includes dividing the ultrapure water into a first part and a second part and decomposing the compound in the first part, so that the first part includes a characteristic substance. The method also includes measuring a first concentration of the characteristic substance in the first part and a second concentration of the characteristic substance in the second part and calculating the difference between the first concentration and the second concentration. The method further includes obtaining the concentration of the compound in the ultrapure water based on the difference.


Find Patent Forward Citations

Loading…