The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2025
Filed:
Jun. 11, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takashi Matsumoto, Nirasaki, JP;
Ryota Ifuku, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/26 (2006.01); C01B 32/186 (2017.01); C23C 16/455 (2006.01); C23C 16/511 (2006.01);
U.S. Cl.
CPC ...
C23C 16/26 (2013.01); C01B 32/186 (2017.08); C23C 16/45542 (2013.01); C23C 16/511 (2013.01);
Abstract
A film forming method includes a first step of supplying a first aromatic hydrocarbon gas having a first functional group to a substrate provided with an underlayer film, and a second step of activating the first aromatic hydrocarbon gas adsorbed on a surface of the underlayer film by plasma of a first reaction gas that contains at least a rare gas.