Method for manufacturing semiconductor structure, semiconductor structure and three-dimensional structure

Abstract

A method includes: providing a substrate including a first region and a second region; a stacked structure being formed on the substrate, the stacked structure including a first semiconductor layers and a second semiconductor layers stacked alternately in sequence along a direction perpendicular to a plane where the substrate is located; etching the stacked structure, such that the first semiconductor layers and the second semiconductor layers located in the second region respectively form a first sub-part extending in a first direction and a third sub-part extending in the first direction; the first semiconductor layers and the second semiconductor layers remaining in the first region respectively constitute a second sub-part extending in a second direction and a fourth sub-part extending in the second direction; removing the third sub-part; and forming a first dielectric layer at least filling a gap between two adjacent ones of the first sub-parts.