The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Oct. 14, 2021
Ebara Corporation, Tokyo, JP;
Kazuhito Tsuji, Tokyo, JP;
EBARA CORPORATION, Tokyo, JP;
Abstract
Provided is a pre-wet process method by which a pre-wet process can be effectively performed on a substrate without affecting throughput. The pre-wet process method for performing the pre-wet process before performing a plating process on a substrate in a plating apparatus is provided. The pre-wet process method includes a step of calculating a maximum process time in a pre-wet module based on a rate limiting step of limiting a rate of a process in the whole plating apparatus, a step of calculating a minimum moving speed of the nozzle head in the pre-wet module based on the calculated maximum process time, and a step of moving the nozzle head at a speed equal to or more than the calculated minimum moving speed to supply a pre-wet liquid to the plate surface of the substrate.