The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Oct. 13, 2023
Entegris, Inc., Billerica, MA (US);
Bryan C. Hendrix, Danbury, CT (US);
Scott L. Battle, Cedar Park, TX (US);
David J. Eldridge, Liberty Hill, TX (US);
John N. Gregg, Marble Falls, TX (US);
Jacob Thomas, Leander, TX (US);
Manuel F. Gonzales, Fort Worth, TX (US);
Kenney R. Jordan, Denton, TX (US);
Benjamin H. Olson, Round Rock, TX (US);
ENTEGRIS, INC., Billerica, MA (US);
Abstract
A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.