The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2025
Filed:
Dec. 20, 2022
Disco Corporation, Tokyo, JP;
Kentaro Iizuka, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A holding table assembly has a base that includes three or more cylinder sections spaced apart at regular intervals in a circumferential direction, a circular recess formed at an upper part thereof, and a flow channel communicating with the cylinder sections and the circular recess. A holding table includes a holding surface inserted into the circular recess of the base that holds an ingot under suction. A circular plate has a plurality of minute holes and insertion holes formed at positions corresponding to each of the cylinder sections and spaced apart at regular intervals in the circumferential direction. Pistons are inserted in the cylinder sections, the number of pistons being equal to the number of cylinder sections, and support pins of which base ends abut against the pistons and tip ends are inserted in the insertion holes.