The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 18, 2025

Filed:

Jun. 28, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Cheng-You Tai, Taipei, TW;

Ling-Sung Wang, Tainan, TW;

Chen-Chieh Chiang, Kaohsiung, TW;

Jung-Chi Jeng, Tainan, TW;

Yi Ping Chao, Tainan, TW;

Zhi-Hong Chung, Pingtung County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); C23C 16/458 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67309 (2013.01); C23C 16/4586 (2013.01); C23C 16/4584 (2013.01);
Abstract

A container for receiving a semiconductor device is provided. In one embodiment, the wafer holder assembly includes a first wafer holder with a plurality of first fingers arranged in a first common horizontal plane and a second wafer holder with a plurality of second fingers arranged in a second common horizontal plane. The first wafer holder and the second holder are configured to move relative to each other in a vertical direction, and the first wafer holder and the second holder are configured to rotate relative to each other around a vertical axis.


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