The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Apr. 27, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Isamu Taoda, Nirasaki, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01N 21/95 (2006.01); G06T 7/00 (2017.01); G06T 7/60 (2017.01); G06T 7/73 (2017.01); H01L 21/68 (2006.01); H01L 21/687 (2006.01); H04N 5/262 (2006.01); H04N 25/701 (2023.01);
U.S. Cl.
CPC ...
H01L 21/67288 (2013.01); G01N 21/9501 (2013.01); G06T 7/0004 (2013.01); G06T 7/60 (2013.01); G06T 7/73 (2017.01); H01L 21/67167 (2013.01); H01L 21/67265 (2013.01); H01L 21/681 (2013.01); H01L 21/68707 (2013.01); H04N 5/2628 (2013.01); H04N 25/701 (2023.01); G06T 2207/30148 (2013.01);
Abstract
A substrate inspection method includes: capturing, while transporting a substrate with a fork, an image of a rear surface of the substrate using a line camera in which light receiving elements are arranged in a width direction orthogonal to a transport direction of the substrate; generating a corrected image by correcting the image captured in the capturing the image based on locus information of the fork when the substrate is being transported; and specifying feature information including a position of an abnormal portion existing on the rear surface of the substrate based on the corrected image.