The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
May. 15, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Jian Li, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); H01J 37/32541 (2013.01); H01J 37/32577 (2013.01); H01J 2237/032 (2013.01); H01J 2237/2007 (2013.01); H01J 2237/334 (2013.01); H01L 21/6833 (2013.01);
Abstract
A method and apparatus for a substrate support, comprising a ceramic body, at least one heater, at least one chucking electrode, and a unitary plasma support structure comprising an electrical connection portion, at least one electrical distribution portion, and annular electrode connected to the electrical connection portion by the at least one electrical distribution portion, the electrical connection portion, at least one electrical distribution portion, and annular electrode configured of a unitary sheet of a conductive fiber mesh.