The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2025
Filed:
Aug. 01, 2022
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Assignee:
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06N 5/022 (2023.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G06N 5/022 (2013.01); H01L 21/67028 (2013.01);
Abstract
A learning device includes a hardware processor, wherein the hardware processor acquires a film thickness of a solid or a liquid formed on the substrate by driving a substrate processing device under a first condition, and causes a learning model to learn first training data including the film-thickness characteristic acquired by driving of the substrate processing device under the first condition.