Electrostatic discharge protection devices with multiple-depth trench isolation

Abstract

Structures for an electrostatic discharge protection device and methods of forming same. The structure comprises a semiconductor substrate including first and second trench isolation regions positioned in the semiconductor substrate. The first trench isolation region extends to a first depth in the semiconductor substrate, and the second trench isolation region extends to a second depth in the semiconductor substrate. The second depth is greater than the first depth. A bipolar junction transistor structure includes a collector, an emitter, and a base each disposed in the semiconductor substrate. The collector includes a portion that extends to the top surface of the semiconductor substrate, the first trench isolation region is positioned in the base, the second trench isolation region is positioned in a lateral direction between the portion of the collector and the base, and the second trench isolation region surrounds the base, the emitter, and the first trench isolation region.