The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Nov. 29, 2021
Tokyo Electron Limited, Tokyo, JP;
Takehiro Shindo, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A correction method includes a placement operation of holding and moving, by a holder, a sensor-equipped substrate equipped with an inclination sensor provided thereon, to a temporary delivery position, and delivering the sensor-equipped substrate from the holder to the stage, an inclination detection operation of detecting, by the inclination sensor, an inclination of the sensor-equipped substrate delivered to the stage, and performing the placement operation and the inclination detection operation on one or a plurality of different temporary delivery positions. The one or plurality of different temporary delivery positions include a position at which a portion of the sensor-equipped substrate is boarded on the stepped portion when the sensor-equipped substrate is delivered from a respective temporary delivery position to the stage. The method further includes a correction operation of correcting the delivery position based on a detection result in the inclination detection operation.