The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Aug. 20, 2021
Asml Netherlands B.v., Veldhoven, NL;
Yongxin Wang, San Ramon, CA (US);
Rui-Ling Lai, San Jose, CA (US);
Nickolay Stepanenko, Helmond, NL;
Jan Bex, Overpelt, BE;
Ronny Hendrix, Velden, NL;
Lidewij Elisa Cornelissen, Eindhoven, NL;
Robert Anton Brookhuis, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Detector modules, systems and methods for detecting signal beams are disclosed using a detector module and a support comprising a feedthrough. Furthermore, apparatuses, systems, and methods for sealing a vacuum system configured to provide an atmospheric environment and a vacuum chamber environment are disclosed. In some embodiments, a printed circuit board (PCB) comprising a first side for exposing to the atmospheric environment and a second side for exposing to the vacuum chamber environment and for covering an aperture in the vacuum chamber environment, wherein the second side is opposite to the first side. The apparatuses, systems, and methods may include a rigid body on the first side of the PCB and a device connected to the second side of the PCB and positioned on a portion of the PCB that covers the aperture. The PCB may be configured to provide an interface between the device and the rigid body.