The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jun. 13, 2023
Applicant:
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Inventor:
Thomas Gorius, Lauchheim, DE;
Assignee:
Carl Zeiss SMT GmbH, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/182 (2021.01); G03F 7/00 (2006.01); H03H 1/00 (2006.01);
U.S. Cl.
CPC ...
G02B 7/182 (2013.01); G03F 7/70258 (2013.01); G03F 7/70825 (2013.01); G03F 7/70883 (2013.01); G03F 7/709 (2013.01); H03H 1/00 (2013.01);
Abstract
A filter assembly, for example for a control loop for controlling the position of at least one element, comprises first and second filters. The first filter suppresses an undesired component in a signal to be filtered. The first filter produces a first signal delay in a first frequency range. The second filter produces a second signal delay in the first frequency range. The second signal delay at least partly compensates the first signal delay.