The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Jun. 23, 2020
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
David Mui, Fremont, CA (US);
Gerome Michel Dominique Melaet, San Leandro, CA (US);
Nathan Musselwhite, San Jose, CA (US);
Michael Ravkin, Los Altos, CA (US);
Mark Kawaguchi, San Carlos, CA (US);
Ilia Kalinovski, Berkeley, CA (US);
Assignee:
LAM RESEARCH CORPORATION, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 5/00 (2006.01); C23F 1/08 (2006.01); C23F 1/12 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23F 1/12 (2013.01); C23F 1/08 (2013.01);
Abstract
A method for cleaning a substrate includes arranging the substrate in a processing chamber; controlling a pressure of the processing chamber to a predetermined pressure range; controlling a temperature of the processing chamber to a predetermined temperature range; and supplying a vapor mixture including a metal chelating vapor for a first period to remove metal contamination from surfaces of the substrate.