The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 11, 2025
Filed:
Apr. 04, 2022
Tokyo Electron Limited, Tokyo, JP;
Takashi Sugimoto, Yamanashi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A method of teaching a transfer device provided with a pick configured to hold a substrate and a mapping sensor, includes: detecting, in a reference accommodation container in which reference substrates are accommodated, height positions of the reference substrates using the mapping sensor and setting a reference position in a height direction; detecting, in a plurality of accommodation containers in which production substrates to be processed in a substrate processing apparatus are accommodated, height positions of the production substrates using the mapping sensor and storing information about the height positions; and correcting the reference position based on the stored information in the plurality of accommodation containers.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile