The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 04, 2025

Filed:

Jan. 27, 2022
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Guancyun Li, Miaoli County, TW;

Ching-Jung Chang, Taichung, TW;

Chi-Feng Tung, Miaoli County, TW;

Hsiang Yin Shen, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B61J 1/06 (2006.01); B61B 3/00 (2006.01); B61L 23/00 (2006.01); B65G 9/00 (2006.01); B66C 19/00 (2006.01); E01B 25/26 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67715 (2013.01); B61B 3/00 (2013.01); B61J 1/06 (2013.01); B61L 23/002 (2013.01); B65G 9/008 (2013.01); B66C 19/00 (2013.01); E01B 25/26 (2013.01); H01L 21/67259 (2013.01); H01L 21/67724 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); E01B 2202/024 (2013.01); H01L 21/67727 (2013.01);
Abstract

An automated material handling system (AMHS) and a method of operating the AMHS are disclosed. In one aspect, the AMHS includes a network of rails and a vehicle configured to hold a sample carrier that stores one or more samples, wherein the vehicle is configured to move within the FAB via the network of rails. The AMHS also includes a turn table connected to the network of rails and configured to rotate about an axis substantially perpendicular to a surface of the turn table. The AMHS further includes a hash rail connected to and overlapping the turn table. The hash rail is configured to rotate about the axis with the turn table.


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