The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Jul. 11, 2023
Tokyo Electron Limited, Tokyo, JP;
Takuya Yamamoto, Yamanashi, JP;
Takashi Sugimoto, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
There is a control device for controlling a vacuum valve device which includes a valve body configured to open and close a transfer path through which a first chamber and a second chamber communicate with each other, a seal member provided in the valve body, and a valve body driver having a motor and configured to drive the valve body, wherein the control device is configured to be switchable between a first operation pattern for controlling the motor at a first separation speed and a second operation pattern for controlling the motor at a second separation speed lower than the first separation speed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile