The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Jul. 16, 2020
Applicant:
Hitachi High-tech Corporation, Tokyo, JP;
Inventors:
Assignee:
Hitachi High-Tech Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01);
Abstract
A defect inspection device calculates a machine difference correction coefficient for correcting a difference in the feature amount of a reference sample between devices. When a machine difference variation coefficient indicating the change over time in the feature amount of a calibration member is outside a threshold range, the defect inspection device recalculates the machine difference correction coefficient by using the feature amount of the calibration member.