The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Jul. 23, 2020
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Gerbrand Van Der Zouw, Waalre, NL;
Marinus Johannes Maria Van Dam, Venlo, NL;
Jacob Sonneveld, Best, NL;
Ramon Pascal Van Gorkom, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/12 (2006.01); G01J 3/02 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G01J 3/12 (2013.01); G01J 3/0237 (2013.01); G03F 7/70575 (2013.01); G03F 7/70616 (2013.01); G01J 2003/1234 (2013.01); G01J 2003/1243 (2013.01);
Abstract
Disclosed is a wavelength selection module for a metrology apparatus. The wavelength selection module comprises one or more filter elements being operable to receive an input radiation beam comprising multiple wavelengths to provide selective control of a wavelength characteristic of a corresponding output radiation beam. At least one of said one or more filter elements comprises at least two linear variable filters.