The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2025
Filed:
Nov. 09, 2022
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Michael Addorisio, Peabody, MA (US);
David Mccrimmon, Andover, MA (US);
Virendra Warke, North Chelmsford, MA (US);
Devon Nichole Dion, Nashua, NH (US);
Benjamin Schooler, Belmont, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); B29C 64/153 (2017.01); B29C 64/268 (2017.01); C23C 16/455 (2006.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 80/00 (2015.01);
U.S. Cl.
CPC ...
C23C 16/45559 (2013.01); B29C 64/153 (2017.08); B29C 64/268 (2017.08); C23C 16/45563 (2013.01); B33Y 10/00 (2014.12); B33Y 30/00 (2014.12); B33Y 80/00 (2014.12);
Abstract
Described are directional gas diffuser devices and housing components thereof; systems that include the gas diffuser devices; methods of using the gas diffuser devices; and methods of manufacturing gas diffuser devices.