The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Mar. 29, 2023
Semes Co., Ltd., Cheonan-si, KR;
Youngjun Son, Cheonan-si, KR;
Taehoon Lee, Osan-si, KR;
Semes Co., Ltd., Cheonan-si, KR;
Abstract
A substrate processing apparatus includes a substrate supporter supporting a substrate, and a processing solution supply apparatus configured to supply a processing solution onto the substrate supported on the substrate supporter, wherein the processing solution supply apparatus includes a trap tank storing the processing solution, a supply line connected to the trap tank to supply the processing solution onto the substrate, a first vent line connected to the trap tank to discharge the processing solution including bubbles or gases from the trap tank, and a first static charge measurement unit connected to the first vent line to measure a static charge of the processing solution, and including a first Faraday cup and a first static charge measurement unit connected to the first Faraday cup.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile