The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Feb. 03, 2023
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Taira Tsuru, Tsuchiura, JP;
Tokyo Seimitsu Co., Ltd., Tokyo, JP;
Abstract
[Solution] A shape measurement device for acquiring a plurality of surface images while scanning a surface of a plate-shaped measurement objectand measuring a shape of the measurement objectincludes: an imaging systemthat irradiates the measurement objectwith parallel light and acquires the surface image; a stage systemthat holds the measurement objectand adjusts an attitude of the measurement objectwith respect to the imaging system; and a control device. The control deviceincludes: an attitude adjustment unitthat controls the imaging systemand the stage systemto scan the surface while adjusting the attitude to obtain a plurality of surface images; and an image processing unitthat generates a restored model of a three-dimensional shape of the measurement objectfrom the plurality of acquired surface images. When acquiring the surface image, the attitude adjustment unitadjusts the attitude so that an angle of incidence of the parallel light onto the surface falls within a predetermined range. According to the shape measurement device, it is possible to measure the shape of a plate-shaped measurement object, particularly a notch portion of a wafer having a complicated shape, with higher accuracy.