The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 28, 2025
Filed:
Feb. 16, 2024
Qualcomm Incorporated, San Diego, CA (US);
Yufei Wu, San Diego, CA (US);
Abhijeet Paul, San Diego, CA (US);
Ravi Pramod Kumar Vedula, San Diego, CA (US);
Mishel Matloubian, San Diego, CA (US);
Periannan Chidambaram, San Diego, CA (US);
Hyunchul Jung, San Diego, CA (US);
QUALCOMM INCORPORATED, San Diego, CA (US);
Abstract
A complementary metal oxide semiconductor (CMOS) integrated humidity sensor with built-in heater is disclosed. In an aspect, a capacitive humidity sensor comprises a substrate and a plurality of unit humidity sensors disposed above the substrate. Each unit humidity sensor comprises a resistive heating structure disposed above the substrate, a plurality of capacitive humidity sensors disposed above the resistive heating structure and set apart from each other in a vertical direction, and a top surface at least a portion of which is water-permeable. Each capacitive humidity sensor comprises a pair of interdigitated vertical metal plates extending in a first direction, set apart from each other in a second direction orthogonal to the first direction, and separated from each other by a moisture-sensitive dielectric disposed between the pair of interdigitated vertical metal plates. At least one capacitive humidity sensor uses a different moisture-sensitive dielectric than another capacitive humidity sensor.