The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Nov. 18, 2021
Applicant:

Hitachi Power Semiconductor Device, Ltd., Hitachi, JP;

Inventors:

Koyo Kinoshita, Hitachi, JP;

Takahiro Morikawa, Hitachi, JP;

Tatsunori Murata, Hitachi, JP;

Kan Yasui, Hitachi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 30/66 (2025.01); H10D 62/10 (2025.01); H10D 62/17 (2025.01);
U.S. Cl.
CPC ...
H10D 30/665 (2025.01); H10D 30/668 (2025.01); H10D 62/107 (2025.01); H10D 62/393 (2025.01);
Abstract

Provided is a semiconductor device where an electric field applied to an electric field protection layer at a bottom of a trench gate electrode of an active region is relaxed and an avalanche withstand voltage is improved. The semiconductor device includes: an active region that has multiple gate trenches, a trench gate electrode in each gate trench, and a P body layer provided to a section other than the gate trenches; and a termination region disposed on the outer periphery of the active region. Additionally, an electric field protection layer is provided to the bottom of each gate trench of the active region, an electric field relaxation layer is between the active region and the termination region, the bottom surface of the electric field relaxation layer is shallower than that of the electric field protection layer, and the electric field relaxation layer is electrically connected to the P body layer.


Find Patent Forward Citations

Loading…