The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Aug. 16, 2022
Applicant:
Wisol Co., Ltd., Gyeonggi-do, KR;
Inventors:
Jin Nyoung Jang, Gyeonggi-do, KR;
Kang Ho Kim, Gyeonggi-do, KR;
Yun Sik Choi, Gyeonggi-do, KR;
Joon Sung Kwon, Gyeonggi-do, KR;
Assignee:
WISOL CO., LTD., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H03H 9/17 (2006.01); H03H 3/02 (2006.01); H03H 9/13 (2006.01);
U.S. Cl.
CPC ...
H03H 9/17 (2013.01); H03H 3/02 (2013.01); H03H 9/131 (2013.01);
Abstract
A method of manufacturing a bulk acoustic wave (BAW) resonator according to an embodiment of the present invention may include: forming a lower electrode above a substrate; forming a nitrogen layer on an upper surface of the lower electrode through nitrogen (N) plasma surface treatment; forming a piezoelectric layer made of an AlScN material above the nitrogen layer to align an upper surface of the piezoelectric layer to an N polarity; and forming an upper electrode above the piezoelectric layer aligned to the N polarity.