The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Aug. 07, 2024
Kla Corporation, Milpitas, CA (US);
Gordon Rouse, Dublin, CA (US);
Srivathsan Krishnamohan, Mountain View, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
Methods and systems for determining information for an area having unknown patterns and unknown pattern repeatability are provided. One or more computer systems of the system are configured for detecting first and second polygons in first and second rows, respectively, in a design for a specimen. The first and second rows have first dimensions perpendicular to an edge of a known area in the design from inner boundaries of the rows to outer boundaries of the rows. The computer system(s) are also configured for determining first and second repeating pitches of the first and second polygons, respectively. When the first and second repeating pitches are different from each other, the computer system(s) are configured for determining an outer boundary of the area having the unknown patterns and the unknown pattern repeatability as the outer boundary of the first row.