The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Jun. 22, 2023
Globalfoundries U.s. Inc., Malta, NY (US);
Keith Donegan, Saratoga Springs, NY (US);
Takako Hirokawa, Ballston Lake, NY (US);
Yusheng Bian, Ballston Lake, NY (US);
Thomas Houghton, Marlboro, NY (US);
Kevin Dezfulian, Arlington, VA (US);
Carrie Yurkon, Saratoga Springs, NY (US);
GlobalFoundries U.S. Inc., Malta, NY (US);
Abstract
Structures including a calibration marker adjacent to a photonic structure and methods of forming such structures. The structure comprises a semiconductor substrate, a photonic structure, and a back-end-of-line stack over the semiconductor substrate. The back-end-of-line stack includes a plurality of fill features, an exclusion area surrounded by the plurality of fill features, and a calibration marker in the exclusion area. The calibration marker is disposed adjacent to the photonic structure, and the calibration marker includes a feature having a predetermined dimension.