The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Jan. 23, 2024
Kla Corporation, Milpitas, CA (US);
Anatoly Shchemelinin, Bozeman, MT (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A gas bearing is disclosed. The gas bearing may include a cylinder with an inner cylinder radius. The gas bearing may include a piston with a piston radius, wherein the inner cylinder radius is larger than the piston radius, wherein the piston is located within the cylinder. The gas bearing may include a gas bearing radius, wherein the gas bearing radius is greater than the piston radius and less than the inner cylinder radius. The gas bearing may include a gap that exists between the cylinder and the piston, wherein the gap contains a pressurized gas, the pressurized gas configured to prevent contact between the cylinder and the piston. The gas bearing may include a gas bearing interface, wherein the gas bearing interface is positioned to control a size of the gap.