The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2025
Filed:
Mar. 07, 2019
Robert Bosch Gmbh, Stuttgart, DE;
Friedjof Heuck, Stuttgart, DE;
Jochen Tomaschko, Gaeufelden, DE;
Peter Schmollngruber, Aidlingen, DE;
Thomas Friedrich, Moessingen-Oeschingen, DE;
Volkmar Senz, Metzingen, DE;
Mike Schwarz, Viermünden, DE;
ROBERT BOSCH GMBH, Stuttgart, DE;
Abstract
A MEMS element is provided. The MEMS element includes: a substrate; a first passivation layer arranged on the substrate; a metal layer arranged on the first passivation layer; a second passivation layer arranged on the metal layer and on the first passivation layer; and a punch element, an electrically conductive diffusion-blocking layer being arranged on the punch element and on the second passivation layer, a first bonding element being arranged on the punch element.