The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 21, 2025

Filed:

Oct. 27, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Fang-Pin Chiang, Taichung, TW;

Chi-Tung Lai, Hsinchu, TW;

Heng-Yi Tseng, Hsinchu County, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
B67D 7/16 (2010.01); B67D 7/14 (2010.01); G01F 23/68 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B67D 7/16 (2013.01); B67D 7/145 (2013.01); H01L 21/67017 (2013.01);
Abstract

A liquid preparation method is provided. The method includes measuring, with a detection member, a quantity of a liquid stored in a liquid tank by emitting a detection signal toward a floating member positioned in a tube. The tube extends in a height direction of the liquid tank and fluidly connects to two connecting ports of the liquid tank that are located at opposite sides of a surface of the liquid, and the position of the floating member in the tube varies according to a level of the liquid in the liquid tank. The method also includes regulating the liquid in the liquid tank in response to the quantity of the liquid in the liquid tank.


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