The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Nov. 06, 2020
Enkris Semiconductor, Inc., Jiangsu, CN;
Kai Cheng, Jiangsu, CN;
Peng Xiang, Jiangsu, CN;
ENKRIS SEMICONDUCTOR, INC., Jiangsu, CN;
Abstract
A semiconductor structure and a manufacturing method thereof are provided in the present disclosure. The semiconductor structure includes a semiconductor substrate; a plurality of stacked structures and a plurality of isolation structures on the semiconductor substrate, wherein the stacked structures are spaced apart each other, and each of the isolation structures are located between adjacent stacked structures; each of the stacked structures comprises a nucleation layer and a first epitaxial layer from bottom to top; and a heterojunction structure on the plurality of stacked structures, wherein the heterojunction structure is distributed over an entire surface, and an air gap is formed between the heterojunction structure and each of the isolation structures.