Integrated circuit device with vertical cell array and through electrodes

Abstract

An integrated circuit device includes; a peripheral circuit structure, a cell array structure including gate lines overlapping the peripheral circuit structure and disposed on the peripheral circuit structure in a vertical direction, a conductive plate interposed between the peripheral circuit structure and the cell array structure and including through holes, conductive lines spaced apart from the conductive plate with the cell array structure interposed between the conductive lines and the conductive plate, and through electrodes connected to the conductive lines and extending to the peripheral circuit structure through the cell array structure and the through holes. The through holes include a first through holes arranged along a first straight line extending in a first horizontal direction, and second through holes arranged along a second straight line extending in parallel with the first straight line and spaced apart from the first straight line in a second horizontal direction.