The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Aug. 04, 2022
Murata Manufacturing Co., Ltd., Nagaokakyo, JP;
Katsuya Daimon, Nagaokakyo, JP;
MURATA MANUFACTURING CO., LTD., Kyoto, JP;
Abstract
An acoustic wave device includes a support substrate, a piezoelectric film, and an IDT electrode. When a wavelength defined by an electrode finger pitch of the IDT electrode is λ, a thickness of the piezoelectric film is about 1λ or less. The piezoelectric film has crystal axes. The support substrate includes first and second silicon layers. A plane orientation of the first and second silicon layers is (100), (110), or (111). When angles α1 and β2 are defined between the plane orientations of the first and second silicon layers and the crystal axes, each of the angles α1 and α2 is one of three types of angles of an angle α, an angle α, and an angle α. A type of the angle α1 is different from a type of the angle α2 and/or a value of the angle α1 is different from a value of the angle α2.