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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12438032 B1

PDFFull Text
Date of Patent:
Oct. 07, 2025

Filed:

Dec. 17, 2021

Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same

Applicant:

Semes Co., Ltd., Cheonan-si, KR;

Inventor:

Cheol Hwan Jeong, Pyeongtaek-si, KR;

Assignee:

SEMES CO., LTD., Cheonan-si, KR;

Attorneys:

PNJ IP Law, P.C.

JINSEONG PARK

Primary Examiner:

Parviz Hassanzadeh

Assistant Examiner:

Margaret undefined Klunk

Int. Cl.
CPC ...
H01L 21/687 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68728 (2013.01); H01L 21/67051 (2013.01); H01L 21/6708 (2013.01); H01L 21/68707 (2013.01); H01L 21/68721 (2013.01); H01L 21/68742 (2013.01);
Abstract

A chuck pin assembly includes a body member provided on a circumferential portion of a chuck supporting a substrate and configured to be movable with respect to the chuck, a grip member gripping a lateral portion of the substrate, and a rotational connection member rotatably coupling the grip member to the body member. As the grip member is rotatable, it is possible to prevent the chuck pin from being worn at a specific portion which contacts the substrate, and to improve the life of the chuck pin.

Find Patent Forward Citations

Jeong, Cheol. (2025). Chuck pin assembly, and substrate holding apparatus and liquid processing apparatus including same (U.S. Patent No. 12438032). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12438032

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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