The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Mar. 10, 2023
Tokyo Electron Limited, Tokyo, JP;
Dongwei Li, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing system comprises a module having a mounting unit on which a substrate is mounted, a transfer chamber connected to the module, and a substrate transfer device disposed in the transfer chamber and configured to transfer the substrate to the module. The substrate transfer device includes a transfer unit having a substrate holder and a base that has therein a magnet and moves the substrate holder along a bottom portion of the transfer chamber, and a planar motor having a plurality of tiles arranged along the bottom portion of the transfer chamber, a plurality of electromagnetic coils disposed in the plurality of tiles, and a linear driving device configured to supply power to the electromagnetic coils and magnetically levitate and linearly drive the base. A tile corresponding to the module among the plurality of tiles is connected to the module without being connected to the transfer chamber.