The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Jul. 24, 2023
Applicant:
Etrology, Llc, Sandy, OR (US);
Inventor:
Vladislav Kaplan, Baanana, IL;
Assignee:
ETROLOGY, LLC, Sandy, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/22 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01);
Abstract
A method of deep structure detection of deep structure signals for a critical dimension scanning electron microscope (CDSEM) image by dividing the image into separate upper and lower regions using self-tunable masking and then denoising and enhancing the upper and lower regions separately, wherein the lower deep structure region is denoised by applying blind denoising by self-supervision (BDSS) thereto.