The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
May. 12, 2021
Hitachi High-tech Corporation, Tokyo, JP;
Sayaka Kurata, Tokyo, JP;
Ryuichirou Tamochi, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A microstructure evaluation system or detecting a fluctuation caused by an imaging device, including a feature data extraction unit configured to extract first feature data from an image captured by an imaging device while changing an observation field of view on a sample; and a fluctuation evaluation unit configured to calculate a long-term fluctuation of the first feature data, return an observation field of view to a position before occurrence of the long-term fluctuation and re-capture an image when the long-term fluctuation exceeds a predetermined criterion, and calculate a difference between the first feature data of the captured image at the position before the occurrence of the long-term fluctuation and the first feature data of the re-captured image. The fluctuation evaluation unit determines that the long-term fluctuation is a fluctuation caused by the imaging device when the difference is equal to or greater than a predetermined threshold.