The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Apr. 27, 2023
Etrology, Llc, Sandy, OR (US);
Vladislav Kaplan, Baanana, IL;
ETROLOGY, LLC, Sandy, OR (US);
Abstract
A system and method for denoising a grey scale image of a pattern on a substrate, including: scanning an electron beam along a pattern, detecting a scan line waveform from the scanned electron beam, obtaining a model scan line waveform from the detected scan line waveform, augmenting the model scan line waveform and adding noise to the augmented model scan line waveform, inputting the noisy augmented model scan line through a deep learning neural network (DNN) process, comparing the output of the DNN process to the augmented model scan line waveform before noise is added, and backpropagating the compared results into the DNN process to obtain a noise discrimination function.