The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Feb. 01, 2023
Advantest Corporation, Tokyo, JP;
ADVANTEST Corporation, Tokyo, JP;
Abstract
A temperature adjusting device includes: a fluid connector connected to a fluid supply source; a heat exchanger thermally connected to a DUT or a carrier holding the DUT being pressed against a socket; a first flow path passing through an inside of the heat exchanger; a first swirl flow forming part that supplies a first swirl flow to the first flow path, the first swirl flow swirling along an inner surface of the first flow path around a first central axis of the first flow path; and a second flow path disposed on an upstream side of the first flow path and connected to the first flow path. The second flow path has a second central axis not intersecting the first central axis, and the first swirl flow forming part is a first connection part where the first and second flow paths are connected to each other.