The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 07, 2025
Filed:
Jan. 04, 2023
Disco Corporation, Tokyo, JP;
Keiji Nomaru, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
A measuring instrument includes a light source, a scanning mirror configured to position the light emitted by the light source at coordinates specified by an X-coordinate and a Y-coordinate on a plate-shaped workpiece held on a chuck table, a diffusing film onto which reflected light is projected, the reflected light forming a spectral interference waveform by being reflected from a top surface and an undersurface of the plate-shaped workpiece held on the chuck table, a light detector configured to detect light intensities corresponding to wavelengths of the spectral interference waveform projected onto the diffusing film, a memory configured to store, for each coordinate, the light intensities corresponding to the wavelengths and being detected by the light detector, and a calculating section configured to calculate a thickness at each coordinate by performing a Fourier transform of the light intensities corresponding to the wavelengths and being stored in the memory.