The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 07, 2025

Filed:

May. 09, 2023
Applicants:

Applied Materials, Inc., Santa Clara, CA (US);

Wayne State University, Detroit, MI (US);

Inventors:

Thomas Joseph Knisley, Livonia, MI (US);

Bhaskar Jyoti Bhuyan, San Jose, CA (US);

Mark Saly, Santa Clara, CA (US);

Shalini Tripathi, Detroit, MI (US);

Charles H. Winter, Bloomfield Hills, MI (US);

Zachary J. Devereaux, Webberville, MI (US);

Assignees:

Applied Materials, Inc., Santa Clara, CA (US);

Wayne State University, Detroit, MI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C07F 11/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/18 (2013.01); C07F 11/005 (2013.01);
Abstract

Metal complexes with nitrile ligands of the type MOXL, where M is molybdenum or tungsten, X is a halogen, each L is independently an organonitrile ligand with the general formula NCR, where each R is independently a C2-C18 group. Metal complexes with dinitrile bidentate ligands of the type MOXL', where L′ is a dintrile ligand, and dinitrile bridging ligands of the type (MOX)L′, where L′ is a dinitrile bridging ligand connecting the two metal atoms. Methods of making and using the metal complexes are described.


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