logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12435410 B1

PDFFull Text
Date of Patent:
Oct. 07, 2025

Filed:

Jul. 02, 2020

Substrate processing system and substrate processing method

Applicant:

Tokyo Electron Limited, Tokyo, JP;

Inventor:

Koji Maeda, Yamanashi, JP;

Assignee:

Tokyo Electron Limited, Tokyo, JP;

Attorney:

Fenwick & West LLP

Primary Examiner:

Michael A Band

Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 14/06 (2006.01); C23C 14/35 (2006.01); C23C 14/50 (2006.01); G11B 5/85 (2006.01); H01J 37/32 (2006.01); H01J 37/34 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
C23C 14/568 (2013.01); C23C 14/06 (2013.01); C23C 14/351 (2013.01); C23C 14/50 (2013.01); G11B 5/85 (2013.01); H01J 37/32733 (2013.01); H01J 37/32743 (2013.01); H01J 37/32899 (2013.01); H01J 37/3452 (2013.01); H01L 21/67184 (2013.01); H01L 21/67742 (2013.01);
Abstract

There is provided a substrate processing system comprising: a plurality of transfer modules having transfer mechanisms configured to transfer substrates; and a plurality of process modules connected to the plurality of transfer modules. The transfer mechanisms of the plurality of transfer modules transfer a plurality of substrates sequentially and serially to the plurality of process modules, and each of the plurality of transfer modules has an aligner configured to align a substrate when transferring the substrate to the process module connected to a relevant transfer module.

Find Patent Forward Citations

Maeda, Koji. (2025). Substrate processing system and substrate processing method (U.S. Patent No. 12435410). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12435410

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…