The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 30, 2025

Filed:

Sep. 15, 2021
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Christopher Connor, Hillsboro, OR (US);

James O'donnell, Forest Grove, OR (US);

Shailesh Kumar Madisetti, Hillsboro, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H10D 30/67 (2025.01); H10D 30/01 (2025.01); H10D 99/00 (2025.01); H01L 21/77 (2017.01);
U.S. Cl.
CPC ...
H10D 30/6755 (2025.01); H10D 30/6757 (2025.01); H10D 99/00 (2025.01); H01L 21/77 (2013.01); H10D 30/0278 (2025.01); H10D 30/6728 (2025.01);
Abstract

A thin film transistor (TFT) structure. In an example, the TFT includes a gate electrode, a first layer comprising an oxide semiconductor material, and a second layer between the first layer and the gate electrode. The second layer is crystalline and is in contact with the first layer, and includes zirconium and oxygen. The TFT includes a first contact coupled to the first layer at a first location, and a second contact coupled to the first layer at a second location. In some cases, the second layer further includes hafnium. In some cases, the TFT includes a third layer between of the gate electrode and the second layer, the third layer comprising a metal and oxygen. The gate electrode may also include the metal. In some cases, hydrogen is present at an interface between the gate electrode and the second layer.


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